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AlN插入层与AlGaN/GaN HEMT电流崩塌效应的关系
引用本文:李诚瞻,刘键,刘新宇,薛丽君,陈晓娟,和致经. AlN插入层与AlGaN/GaN HEMT电流崩塌效应的关系[J]. 半导体学报, 2006, 27(6): 1055-1058
作者姓名:李诚瞻  刘键  刘新宇  薛丽君  陈晓娟  和致经
作者单位:中国科学院微电子研究所,北京,100029
基金项目:国家研究发展基金,中国科学院基金
摘    要:比较有无AlN插入层AlGaN/GaN HEMTs在直流偏置应力条件下的电流崩塌程度,研究AlN插入层对电流崩塌的影响.从测试结果看,无AlN插入层的AlGaN/GaN HEMTs有更显著的电流崩塌程度,表明AlN插入层对电流崩塌效应有显著的抑制作用.模拟的AlGaN/GaN能带结构表明,AlN插入层能显著提高AlGaN导带底能级,增加异质结的带隙差.带隙差的增加有利于减小电子遂穿几率,加强沟道二维电子气的量子限制,从而抑制电流崩塌效应.

关 键 词:AlN插入层  HEMTs  电流崩塌效应  热电子
收稿时间:2015-08-20

Correlations Between an AlN Insert Layer and Current Collapse in AlGaN/GaN HEMTs
Li Chengzhan, Liu Jian, Liu Xinyu, Xue Lijun, Chen Xiaojuan, He Zhijing. Correlations Between an AlN Insert Layer and Current Collapse in AlGaN/GaN HEMTs[J]. Journal of Semiconductors, 2006, In Press. Li C Z, Liu J, Liu X Y, Xue L J, Chen X J, He Z J. Correlations Between an AlN Insert Layer and Current Collapse in AlGaN/GaN HEMTs[J]. Chin. J. Semicond., 2006, 27(6): 1055.Export: BibTex EndNote
Authors:Li Chengzhan  Liu Jian  Liu Xinyu  Xue Lijun  Chen Xiaojuan  He Zhijing
Affiliation:Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China
Abstract:Based on a comparison of the degree of drain current collapse in AlGaN/GaN HEMTs with and without an AlN insert layer under short-term DC bias stress,the effects of an AlN insert layer on current collapse induced by DC bias stress are investigated.Under some DC bias stress,the degree of drain current collapse of AlGaN/GaN HEMTs with an AlN insert layer is less prominent than that with no AlN insert layer,indicating that an AlN insert layer can inhibit current collapse effectively.The energy band structures of AlGaN/GaN HEMTs with and without AlN insert layers make clear that an AlN insert layer raises the conductance band and increases the effective heterostructure band discontinuity ΔEc prominently,which is beneficial for strengthening the quantum limitation of 2DEG and decreasing the probability of hot electron tunneling through the AlGaN barrier layer to the surface.Therefore,an AlN insert layer appears to inhibit current collapse.
Keywords:AlN insert layer   HEMTs   current collapse effect   hot electron
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