| 高质量InAs单晶材料的制备及其性质 |
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| 引用本文： | 赵有文,孙文荣,段满龙,董志远,杨子祥,吕旭如,王应利. 高质量InAs单晶材料的制备及其性质[J]. 半导体学报, 2006, 27(8): 1391-1395 |
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| 作者姓名： | 赵有文 孙文荣 段满龙 董志远 杨子祥 吕旭如 王应利 |
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| 作者单位： | 中国科学院半导体研究所,北京,100083 |
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| 摘 要： | 利用液封直拉法(LEC)生长了直径50mm〈100〉和〈111〉晶向的InAs单晶.分析研究了n型杂质Sn,S和p型杂质Zn,Mn的分凝特性、晶格硬化作用、掺杂效率等.利用X射线双晶衍射分析了晶体的完整性.对InAs晶片的抛光、化学腐蚀和清洗进行了分析,在此基础上实现了抛光晶片的开盒即用(EPI-READY).
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| 关 键 词： | 砷化铟 掺杂 抛光 |
| 收稿时间： | 2015-08-20 |
Growth and Properties of High Quality InAs Single Crystals |
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| Zhao Youwen, Sun Wenrong, Duan Manlong, Dong Zhiyuan, Yang Zixiang, Lü Xuru, Wang Yingli. Growth and Properties of High Quality InAs Single Crystals[J]. Journal of Semiconductors, 2006, In Press. Zhao Y W, Sun W R, Duan M L, Dong Z Y, Yang Z X, Lü X, Wang Y L. Growth and Properties of High Quality InAs Single Crystals[J]. Chin. J. Semicond., 2006, 27(8): 1391.Export: BibTex EndNote |
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| Authors: | Zhao Youwen Sun Wenrong Duan Manlong Dong Zhiyuan Yang Zixiang Lü Xuru Wang Yingli |
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| Affiliation: | Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100084,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100085,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100086,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100087,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100088,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100089,China |
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| Abstract: | We grow 50mm-diameter InAs single crystals of 〈100〉 and 〈111〉 orientations with liquid encapsulated Czochralski (LEC) method.The segregation behavior,lattice hardening effect,and doping efficiency of n-type impurities S, Sn and p-type impurities Zn, Mn are studied.The lattice perfection of the InAs single crystal is studied with X-ray diffraction.The polishing,chemical etching and cleaning of an InAs wafer are analyzed.An epi-ready InAs polished single crystal wafer is realized. |
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| Keywords: | indium arsenide doping polishing |
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