| 基于0.25μm MS/RF CMOS工艺的光电单片集成接收机设计 |
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| 引用本文： | 陈弘达,高鹏,毛陆虹,黄家乐.基于0.25μm MS/RF CMOS工艺的光电单片集成接收机设计[J].半导体学报,2006,27(2). |
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| 作者姓名： | 陈弘达 高鹏 毛陆虹 黄家乐 |
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| 作者单位： | 1. 中国科学院半导体研究所,集成光电子国家重点联合实验室,北京,100083
2. 天津大学电子信息工程学院,天津,300072 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，中国科学院资助项目 |
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| 摘 要： | 设计了一种单片集成的光电接收机芯片.在同一衬底上制作了基于同一工艺的光电二极管与接收机电路,以消除混合集成引入的寄生影响.这种单片集成接收机采用了先进的深亚微米MS/RF(混合信号/射频)CMOS工艺,利用这种新型工艺提供的新技术对原有光电二极管进行了改进,使其部分性能显著改善,并对整个光电集成芯片性能的提高有所帮助.
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| 关 键 词： | 单片集成 光电集成电路 CMOS工艺 |
Monolithically Integrated Optoelectronic Receivers Implemented in 0.25μm MS/RF CMOS |
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| Chen Hongda,Gao Peng,Mao Luhong,Huang Jiale.Monolithically Integrated Optoelectronic Receivers Implemented in 0.25μm MS/RF CMOS[J].Chinese Journal of Semiconductors,2006,27(2). |
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| Authors: | Chen Hongda Gao Peng Mao Luhong Huang Jiale |
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| Abstract: | A monolithically integrated optoelectronic receiver is presented. A silicon-based photo-diode and receiver circuits are integrated on identical substrates in order to eliminate the parasitics induced by hybrid packaging.Implemented in the present deep sub-micron MS/RF (mixed signal, radio frequency) CMOS,this monolithically OEIC takes advantage of several new features to improve the performance of the photo-diode and eventually the whole OEIC. |
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| Keywords: | monolithically integrated OEIC CMOS process |
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