| 钛酸锶钡薄膜微细图形的制备 |
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| 引用本文： | 张卫华,赵高扬,李莺,赵卫. 钛酸锶钡薄膜微细图形的制备[J]. 半导体学报, 2006, 27(9): 1590-1594 |
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| 作者姓名： | 张卫华 赵高扬 李莺 赵卫 |
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| 作者单位： | 1. 西安理工大学材料科学与工程学院,西安,710048
2. 中国科学院西安光学精密机械研究所,西安,710068 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，国家自然科学基金，陕西省自然科学基金 |
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| 摘 要： | 采用化学修饰的溶胶凝胶工艺,制备了具有紫外光感应特性的钛酸锶钡(Ba0.8Sr0.2TiO3)溶胶及其凝胶薄膜.提出了钛酸锶钡薄膜微细加工的新方法,即以苯酰丙酮(BzAcH)为化学修饰剂,乙酸钡、氯化锶、钛酸丁酯为原料,甲醇为溶剂,乳酸为催化剂,合成了具有螯合物结构的前驱溶胶体系.其螯合物的特征吸收峰在358nm附近,该溶胶及其凝胶薄膜在室温下有较好的化学稳定性;高压汞灯产生的紫外光照射可以分解薄膜中的螯合物结构,伴随着这种螯合物结构的分解,薄膜在乙醇中的溶解性迅速降低,从而表现出紫外光感应特性.利用这种光感应特性,采用紫外光通过掩膜照射薄膜,然后在乙醇中溶洗,获得了凝胶薄膜的微细图形,进一步通过600℃晶化热处理,最后得到了具有钙钛矿相结构和铁电特性的钛酸锶钡薄膜的微细图形.
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| 关 键 词： | 钛酸锶钡 铁电薄膜 微细图形 溶胶凝胶 |
| 收稿时间： | 2015-08-18 |
| 修稿时间： | 2006-04-24 |
Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning |
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| Zhang Weihua, Zhao Gaoyang, Li Ying, Zhao Wei. Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning[J]. Journal of Semiconductors, 2006, In Press. Zhang W H, Zhao G Y, Li Y, Zhao W. Photosensitive Barium Strontium Titanate Gel Films and Their Fine-Patterning[J]. Chin. J. Semicond., 2006, 27(9): 1590.Export: BibTex EndNote |
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| Authors: | Zhang Weihua Zhao Gaoyang Li Ying Zhao Wei |
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| Affiliation: | School of Materials Science & Engineering, Xi’an University of Technology, Xi’an 710048, China;School of Materials Science & Engineering, Xi’an University of Technology, Xi’an 710048, China;School of Materials Science & Engineering, Xi’an University of Technology, Xi’an 710048, China;Xi’an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences, Xi’an 710068, China |
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| Abstract: | A method is developed to fabricate fine patterns of BST films.With methanol as solvent,barium acetate,strontium chloride,and tetrabutyl titanate as starting materials,lactic acid as catalyzer,and Benzoylacetone (BzAcH) as chemical modifier,the photosensitive BST sols and their gel films with a chelate structure of ≡Ti-BzAc are prepared,both of which have good chemical stability at room atmosphere.The UV absorption peak of the chelate structure is located at about 358nm.The chelate structure can be dissociated using UV light from a high-pressure mercury lamp to irradiate the gel films,which shows the photosensitivity of the gel films.Due to the dissociation of the chelate structure,the solubility of the gel films in alcohol is remarkably decreased.Utilizing the photosensitivity,the BST gel films are irradiated by UV light through a pattern mask and leached by alcohol.The fine patterning of BST gel film is thus prepared.After annealing at 600℃,the fine patterning of BST films with perovskite structure and ferroelectric properties can be obtained. |
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| Keywords: | barium strontium titanate ferroelectric films fine patterning sol-gel |
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