| 纳米Ag夹层ZnO薄膜的光电性能 |
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| 引用本文： | 闫金良,孙学卿,曲崇,赵银女.纳米Ag夹层ZnO薄膜的光电性能[J].纳米技术与精密工程,2010,8(1):12-15. |
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| 作者姓名： | 闫金良 孙学卿 曲崇 赵银女 |
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| 作者单位： | 鲁东大学物理与电子工程学院,烟台,264025 |
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| 基金项目： | 国家自然科学基金资助项目(10974077);;山东省自然科学基金资助项目(ZR2009GM035);;鲁东大学科技创新工程资助项目(WL2008002) |
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| 摘 要： | 用射频磁控溅射ZnO陶瓷靶、直流磁控溅射Ag靶的方法在室温下制备了Ag纳米夹层结构ZnO薄膜．用X射线衍射仪、紫外一可见分光光度计、四探针电阻测量仪和原子力显微镜对薄膜样品的结构、光学透过率、面电阻和表面形貌进行表征．结果表明，ZnO衬底有利于Ag夹层形成连续膜．随着Ag层厚度的增加，Ag夹层ZnO薄膜呈现多晶结构，Ag（111）衍射峰强度增强，面电阻先迅速下降后缓慢下降．随着ZnO膜厚度的增加，Ag夹层ZnO薄膜的透射峰红移．制得样品的最佳可见光透过率高达92．3％，面电阻小于4．2Ω／□．
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| 关 键 词： | Ag夹层 ZnO薄膜 光学性能 电学性能 |
Electrical and Optical Properties of ZnO Films with Ag Nanoscale Interlayer |
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| YAN Jin-liang,SUN Xue-qing,QU Chong,ZHAO Yin-nü.Electrical and Optical Properties of ZnO Films with Ag Nanoscale Interlayer[J].Nanotechnology and Precision Engineering,2010,8(1):12-15. |
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| Authors: | YAN Jin-liang SUN Xue-qing QU Chong ZHAO Yin-nü |
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| Affiliation: | School of Physics and Electronic Engineering/a>;Ludong University/a>;Yantai 264025/a>;China |
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| Abstract: | ZnO films with Ag nanoscale interlayer were prepared on glass substrates with alternate RF magnetron sputtering of ZnO and DC magnetron sputtering of Ag at room temperature.The structure,optical transmittance,sheet resistance and surface morphology of the films were studied using X-ray diffraction,UV-VIS spectrometer,four-point probe and atomic force microscopy.Results indicates that ZnO substrates are helpful in forming continuous Ag films.With the increase of Ag interlayer thickness,ZnO films with Ag inte... |
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| Keywords: | Ag interlayer ZnO film optical property electrical property |
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