| 超导／半导兼容材料的制作及性能分析 |
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| 引用本文： | 钱文生,刘融.超导／半导兼容材料的制作及性能分析[J].微电子学,1996,26(2):119-124. |
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| 作者姓名： | 钱文生 刘融 |
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| 作者单位： | 东南大学微电子中心 |
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| 摘 要： | 介绍了几种结构合理的超导／半导兼容材料的制作技术及其测试结果，重点讨论了超导体（ＹＢＣＯ）与半导体（Ｓｉ，ＣａＡｓ）间缓冲层的选取，并对这几种复合材料的性能作了较详细的分析。
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| 关 键 词： | 超导体 半导体 兼容材料 缓冲层 |
Fabrication of Superconductor/Semiconductor Compatible Material and Their Properties |
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| QIAN Wensheng, LIU Rong and WEI Tongli.Fabrication of Superconductor/Semiconductor Compatible Material and Their Properties[J].Microelectronics,1996,26(2):119-124. |
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| Authors: | QIAN Wensheng LIU Rong and WEI Tongli |
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| Abstract: | Fabrication technologies for several superconductor/semiconductor compatible materials are presented. Problems encountered in the fabrication are discussed, with emphasis on the choice of buffer layers between semiconductors and superconductors. The properties of these materials are analyzed in detail. |
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| Keywords: | Semiconductor Superconductor Compatible material Buffer layer |
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