| CMOS差动式流量传感器 |
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| 引用本文： | 于梅芳. CMOS差动式流量传感器[J]. 传感器与微系统, 1995, 0(4): 25-29 |
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| 作者姓名： | 于梅芳 |
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| 作者单位： | 南京邮电学院 |
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| 摘 要： | 提出了一种新颖的与硅栅ＣＭＯＳ工艺相兼容的ＣＭＯＳ差动式流量传感器结构，文中对器件敏感机理和电路进行了分析，理论分析与实验结果相吻合。
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| 关 键 词： | 流量传感器，差分结构，微机械加工 |
The CMOS Differential flow Sensor |
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| Yu Meifang. The CMOS Differential flow Sensor[J]. Transducer and Microsystem Technology, 1995, 0(4): 25-29 |
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| Authors: | Yu Meifang |
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| Affiliation: | Nanjing Institute of Posts and Elecomm |
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| Abstract: | In the paper, a novel CMOS differential flow sensor compatible with standard Si-gate CMOS IC process has been presented. The sensing mechanism and the circuit of the device has been analysed. The experimented result has been in agreement with theoretic analysis. |
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| Keywords: | Flow sensor Differential structure Micro-machining |
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