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A Precision Device for the Positioning of the Probe in Scanning-Probe Microscopy
Authors:A. V. Zhikharev  S. G. Bystrov  O. V. Karban'
Affiliation:(1) Ural Division, Russian Academy of Sciences, Physicotechnical Institute, ul. Kirova 132, Izhevsk, 426001, Russia
Abstract:A device for positioning of a probe over an area of 1000 × 1000 mgrm with an accuracy of 1 mgrm is described. The device is compatible with scanning-probe microscopes available from the NT-MDT Co. (Zelenograd, Russia). It is shown that the device can be used for the examination of large objects and objects with highly developed surface topography.
Keywords:
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