| 燃焰法沉积金刚石薄膜的实验研究 |
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| 引用本文： | 黄树涛 姚英学. 燃焰法沉积金刚石薄膜的实验研究[J]. 材料科学与工艺, 1996, 4(4): 89-93 |
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| 作者姓名： | 黄树涛 姚英学 |
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| 作者单位： | 哈尔滨工业大学 |
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| 摘 要： | 研究分析了燃焰法沉积金刚石薄膜时基片表面处理状态，燃烧气体流量比基片温度对薄膜成核密度、质量和晶体形态的影响。结果表明，在不同粒度的研磨粉研磨的基片表面上金刚石薄膜成核密度不同；燃烧气体流量配比对金刚石薄膜的质量影响很大；基片温度是影响金刚石薄膜晶体形态的一个重要因素。
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| 关 键 词： | 燃焰法 金刚石薄膜 化学气相沉积 |
Experimental Study on Deposition of Diamond Films by Combustion Flame CVD |
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| Huang Shutao,Yao Yingxue,Chen Shuodong,Zhang Hongzhi,Yuan Zhejun. Experimental Study on Deposition of Diamond Films by Combustion Flame CVD[J]. Materials Science and Technology, 1996, 4(4): 89-93 |
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| Authors: | Huang Shutao Yao Yingxue Chen Shuodong Zhang Hongzhi Yuan Zhejun |
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| Affiliation: | Harbin Institute of Technology |
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| Abstract: | The effect of the substrate surface pre-treatment conditions,the oxygen to acetylene flow ratio and substrate surface temperature on the nucleation density,the quality of diamond films and the crystal morphologies are investigated.The results show that the diamond powder size for grounding substrate surface has strong effect on the nucleation density of diamond,the oxygen to acelylene flow ratio affects the quality of diamond films and the substrate surface temperature is an important factor affecting crystal morphologies of dismond films |
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| Keywords: | Combustion flame CVD Diamond film Crystal morphology |
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