Evaluating sharpness functions for automated scanning electron microscopy |
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Authors: | Rudnaya M E Mattheij R M M Maubach J M L |
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Affiliation: | Department of Mathematics and Computer Science, Eindhoven University of Technology, Eindhoven, The Netherlands. m.rudnaya@tue.nl |
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Abstract: | Fast and reliable autofocus techniques are an important topic for automated scanning electron microscopy. In this paper, different autofocus techniques are discussed and applied to a variety of experimental through-focus series of scanning electron microscopy images with different geometries. The procedure of quality evaluation is described, and for a variety of scanning electron microscope samples it is demonstrated that techniques based on image derivatives and Fourier transforms are in general better than statistical, intensity and histogram-based techniques. Further, it is shown that varying of an extra parameter can dramatically increase quality of an autofocus technique. |
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Keywords: | Autofocus automatic focusing focusing scanning electron microscopy SEM |
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