|
|||||
|
|
The influence of fluids on the microhardness of single crystal silicon |
|
| Authors: | Soo-Wohn Lee Dae-Soon Lim Steven Danyluk |
| Affiliation: | (1) Department of Civil Engineering, Mechanics and Metallurgy, University of Illinois at Chicago, 60680 Chicago, IL, USA |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |