Near-Stoichiometric Silicon Carbide from an Economical Polysilane Precursor |
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| Authors: | Dietmar Seyferth Timothy G. Wood Henry J. Tracy Jennifer L. Robison |
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| Affiliation: | Department of Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 |
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| Abstract: | Na condensation of CH3SiHCl2 gives polysilanes of the type ((CH3SiH) x (CH3Si) y ) n (where x + y = 1) whose pyrolysis in a stream of Ar gives SiC and a substantial amount of elemental Si. Treatment of such polysilanes with catalytic quantities of group-IV-metal–organometallic complexes, ((η-C5H5)2ZrH2) n , (η-C5H5)2Zr(CH3)2, (η-C5H5)2ZrHCl, and (η-C5H5)2-Ti(CH3)2, results in cross-linking processes such that pyrolysis of these polysilanes gives close to stoichiometric SiC (≥95 wt %) and only very little elemental Si. |
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| Keywords: | silicon carbide synthesis polysilanes precursors pyrolysis |
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