| 射频磁控溅射制备的柔性衬底ZnO∶Al透明导电薄膜的研究 |
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| 引用本文： | 杨田林,张德恒,李滋然,马洪磊,马瑾.射频磁控溅射制备的柔性衬底ZnO∶Al透明导电薄膜的研究[J].太阳能学报,1999(2). |
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| 作者姓名： | 杨田林 张德恒 李滋然 马洪磊 马瑾 |
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| 作者单位： | 山东建材学院分院，山东大学物理系，山东大学化学系，山东大学光电材料与器件研究所 |
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| 摘 要： | 用射频磁控溅射方法在有机柔性衬底上制备出附着性好、电阻率低、透射率高的ＺｎＯ：Ａｌ透明导电膜。研究了薄膜的结构、电学和光学特性
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| 关 键 词： | 磁控溅射，柔性衬底，ZnO：Al薄膜 |
STUDY OF TRANSPARENT CONDUCING ZnO:Al FILMS DEPOSITED ON ORGANIC SUBSTRATE BY R.F. MAGNETRON SPUTTERING |
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| Yang Tianlin,Zhang Deheng,Li Ziran,Ma Honglei,Ma Jin.STUDY OF TRANSPARENT CONDUCING ZnO:Al FILMS DEPOSITED ON ORGANIC SUBSTRATE BY R.F. MAGNETRON SPUTTERING[J].Acta Energiae Solaris Sinica,1999(2). |
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| Authors: | Yang Tianlin Zhang Deheng Li Ziran Ma Honglei Ma Jin |
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| Affiliation: | Yang Tianlin 1 Zhang Deheng 2 Li Ziran 3 Ma Honglei 1 Ma Jin 1, |
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| Abstract: | Transparent conducting ZnO:Al films with good adhesion,low resistivity and high transmittance have been prepared on the organic substrate by r.f.magnetron sputtering.The structural,electrical and optical properties of the obtained films were studied. |
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| Keywords: | magnetron sputtering organic substrate ZnO:Al films |
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