压阻式压力传感器实时自校正方法研究

目前的传感器误差校正方法,由于都是以传感器初始标定数据作为依据,从而随着使用时间的增加,传感器参数发生变化,其校正误差会逐步增大。针对这种情况,研究了用多基准恒流源模拟标准压力自动对传感器进行标定得到实时输出特性曲线,并据此求得测量压力。实验结果表明:该校正方法切实可行,若采用4个基准源校正,可在一定的温度和压力范围内实现0.15%的精度。

Study on real-time self-correcting method for piezoresistive pressure sensor

At present,the correcting method of sensor error depends on sensor prime data so that when working time increases and sensor parameter is changed,the correcting error will increase.According to this instance,the method of auto-calibration sensor is studied in which using multi-benchmark cource current simulates normal pressure so that reat-time output curve can be obtained and measurement pressure can be calculated by reat-time output curve.Experiment indicates that above method has practicality and 0.15?% accuracy can be achieved in a certain temperature and pressure range if four benchmark sources can be used.