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| 多晶硅薄膜太阳电池的研究与进展 | |
| 引用本文： | 胡芸菲,沈辉,梁宗存,刘正义.多晶硅薄膜太阳电池的研究与进展[J].太阳能学报,2005,26(2):200-206. |
| 作者姓名： | 胡芸菲 沈辉 梁宗存 刘正义 |
| 作者单位： | 1. 华南理工大学机械工程学院,广州,510640 2. 中山大学太阳能系统研究所,广州,510275 3. 中科院广州能源研究所,广州,510070 |
| 基金项目： | 中科院“百人计划”(99-019-422288)，国家863计划(2001AA513060)，广东省科技三项(2KB0080JG)，广东省科技计划项目(A1100501) |
| 摘 要： | 从薄膜的沉积方式和沉积温度以及衬底材料等几方面综合分析了多晶硅薄膜制备工艺的特点及多晶硅薄膜太阳电池的最新研究进展。并以颗粒硅带(SSP)为衬底，采用快热化学气相沉积(RTCVD)法制备了多晶硅薄膜，随后制得的多晶硅薄膜太阳电池的效率达到6．05％。 |
| 关 键 词： | 多晶硅薄膜 颗粒硅带 化学气相沉积 区熔再结晶 |
| 文章编号： | 0254-0096(2005)02-0200-07 |
STUDY AND DEVELOPMENTS ON POLYCRYSTALLINE SILICON THIN FILM SOLAR CELLS |
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| Hu Yunfei,Shen Hui,Liang Zhongdun,Liu Zhengyi.STUDY AND DEVELOPMENTS ON POLYCRYSTALLINE SILICON THIN FILM SOLAR CELLS[J].Acta Energiae Solaris Sinica,2005,26(2):200-206. | |
| Authors: | Hu Yunfei Shen Hui Liang Zhongdun Liu Zhengyi |
| Abstract: | Poly-silicon thin film solar cells has got much attention around the world owing to the low cost and potentially high efficiency.The thin film technology was introduced including deposition technique,temperature and substrates.The new developments on poly-silicon thin film solar cells were discussed.Poly-silicon thin films were prepared by RTCVD(Rapid Thermal Chemical Vapor Deposition) method with SSP(Silicon Sheet from Powder) as substrates,then the poly-silicon thin film solar cells were developed with the efficiency up to 6.05%. |
| Keywords: | poly-silicon thin film SSP CVD ZMR |
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