|
|||||
|
|
Low Pressure Piezoresistive Sensors for Medical Electronics Applications |
|
| Authors: | C Pramanik H Saha |
| Affiliation: | a IC Design and Fabrication Center, Department of Electronics and Telecommunication Engineering, Jadavpur University, Kolkata, India |
| Abstract: | Piezoresistive pressure sensors are being widely used for various industrial applications, such as in automobiles and process control. But conventional MEMS piezoresistive pressure sensors possess low sensitivity in the lower pressure range for biomedical applications. Alternative structures of MEMS pressure sensors include the use of bossed diaphragms and nanocrystalline piezoresistors. In this paper, four different diaphragm structures—flat diaphragm, standard bossed diaphragm, complementary bossed diaphragm, and nanocrystalline porous silicon-silicon composite diaphragm—have been analyzed in terms of sensitivity and nonlinearity. |
| Keywords: | ANSYS Biomedical application Complementary bossed diaphragm Design Flat diaphragm Low pressure MEMS sensor Nanocrystalline silicon Nonlinearity Piezoresistive Porous silicon Resolution Sensitivity Simulation Stress distribution |
| 本文献已被 InformaWorld 等数据库收录！ | |