基于元素灯的多通道光谱仪定标研究

多通道光谱仪光谱范围为190～603 nm,由于常规的汞灯定标方式在部分波段谱线较少,不满足定标后谱线准确度要求。为了使定标精度更高,本文研究了利用元素灯对多通道光谱仪进行光谱定标。通过分析190～603 nm波段内Ag、Zn、Mg、Hg、Bi、Mn、Cu、Na、Si、Ca、Cr、Se、As等13组空心阴极元素灯的光谱,选取可利用谱线,将该谱线与实际的数据库进行对比,得到可利用谱线的实际波长;然后利用待定标多通道光谱仪分析13组空心阴极元素灯的光谱,得到可利用谱线的像素点;最后通过最小二乘多项式算法实现各通道的光谱定标。定标后,分析设备的波长准确度,验证经元素灯定标后的设备满足波长准确度要求。

Multi-channel spectrometer calibration based on elemental lamp

The spectral range of multi-channel spectrometer is 190~603 nm.Due to the less spectral lines in some bands,the conventional calibration method of mercury lamp cannot meet the requirements of the accuracy of spectral lines after calibration.In order to improve the precision of calibration,the spectral calibration of multi-channel spectrometer using elemental modulation is studied in this paper.Firstly,by analyzing the spectra of 13 sets of hollow cathode element lamps such as Ag,Zn,Mg,Hg,Bi,Mn,Cu,Na,Si,Ca,Cr,Se,As,etc.in the 190~603 nm band,the available spectral lines are selected,and the actual wavelength of the available spectral line is obtained by comparing the spectral line with the actual database.Then,the spectrum of 13 sets of hollow cathode element lamps is analyzed by using a multi-channel spectrometer to be calibrated,and the pixel points of the available spectral lines are obtained.Finally,the spectral calibration of each channel is realized by the least squares polynomial algorithm.After the calibration,the wavelength accuracy of the device is analyzed,and it is verified that the device after calibration by the element lamp can meet the wavelength accuracy requirements.