大口径大视场望远镜探测器平面度检测方法综述

为了更好地适应大口径大视场望远镜的成像要求,在相机焦平面拼接多个CCD使其能够覆盖望远镜的全视场成为大口径大视场望远镜光学相机设计的重点。本文系统地总结了当前国内外探测器平面度测量方法的最新研究进展,对比了应用较广的扫描白光干涉仪、三角激光测量仪以及激光同轴位移器的特点。文章还结合了国外大口径大视场望远镜中的相机焦平面靶面拼接特点,对其测量方法及设备进行了详细介绍和总结分析,为大口径大视场地基光电望远镜焦平面拼接探测器的平面度测量提供一定的经验参考。

Overview of CCDs flatness test method for large aperture and wide-field telescope

In order to better adapt to the imaging requirements of large aperture and wide-field of view telescope,the combination of multiple CCDs in the focal plane of camera makes it possible to cover the full field of view of the telescope. In this paper,the latest research progress of target plane flatness measurement methods at home and abroad is summarized systematically,and the characteristics of scanning white light interferometer,triangle laser measuring instrument and laser coaxial displacer,which are widely used,are compared. This paper also introduces and summarizes the measurement methods and equipment of the focal plane target splicing characteristics of large aperture and wild-field of view telescopes abroad,and provides some experience for the flatness measurement of the focal plane splicing target surface of large aperture and wild-field of view telescopes.