| 硅PIN光电二极管光谱响应特性的数值模拟计算 |
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| 引用本文： | 张卓勋,但伟,王波,向勇军,赵珊,鲁卿. 硅PIN光电二极管光谱响应特性的数值模拟计算[J]. 半导体光电, 2006, 27(6): 690-693 |
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| 作者姓名： | 张卓勋 但伟 王波 向勇军 赵珊 鲁卿 |
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| 作者单位： | 重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060 |
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| 摘 要： | 对硅PIN光电二极管的光谱响应特性作了详细的分析计算,得到了硅PIN光电二极管光谱响应的计算公式;给出了器件光谱响应曲线的绘制方法.实测数据与公式计算结果吻合较好.讨论了器件工艺参数变化对光谱响应的影响.
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| 关 键 词： | 数值计算 光谱响应 硅光电二极管 |
| 文章编号： | 1001-5868(2006)06-0690-04 |
| 收稿时间： | 2006-05-24 |
| 修稿时间： | 2006-05-24 |
Numerical Simulation Calculation on Spectral Response of Silicon PIN Photodiode |
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| ZHANG Zhuo-xun,DAN Wei,WANG Bo,XIANG Yong-jun,ZHAO Shan,LU Qing. Numerical Simulation Calculation on Spectral Response of Silicon PIN Photodiode[J]. Semiconductor Optoelectronics, 2006, 27(6): 690-693 |
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| Authors: | ZHANG Zhuo-xun DAN Wei WANG Bo XIANG Yong-jun ZHAO Shan LU Qing |
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| Affiliation: | Chongqing Optoelectronics Research Institute, Chongqing 400060, CHN |
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| Abstract: | The spectral response characteristics of silicon PIN photodiode have been studied by numerical calculation. The formula of spectral response for silicon PIN photodiode has been proposed as well as the explanation of its drawing method. Simulation result is fairly consistent with the experimental one. The influences of process parameters on its spectral response characteristics have been discussed. |
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| Keywords: | simulation calculation spectral response characteristics silicon photodiode |
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