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大相对孔径凹非球面镜的加工
引用本文:孔祥蕾,郝沛明,丁厚月. 大相对孔径凹非球面镜的加工[J]. 量子电子学报, 2001, 18(1): 50-55
作者姓名:孔祥蕾  郝沛明  丁厚月
作者单位:中国科学院安徽光学精密机械研究所,
摘    要:过去一直采用平行光管来加工和检验大相对孔径凹球面的方法,存在许多不足之处,如加工精度不高和加工周期长等,现在我们采用补偿法,则可以在较短的时间内获得高精度的凹非球面,其精度可达λ/20(rms),经过长期的实践,已充分证明了这种方法是可行的。

关 键 词:大相对孔径 凹非球面镜 光学元件
文章编号:1007-5461(2001)01-0050-06
收稿时间:1999-10-21
修稿时间:1999-10-21

The Manufacturing of Concave Aspheric Surface with Large Speed Aperture
Kong Xianglei,Hao Peiming,Ding Houyue. The Manufacturing of Concave Aspheric Surface with Large Speed Aperture[J]. Chinese Journal of Quantum Electronics, 2001, 18(1): 50-55
Authors:Kong Xianglei  Hao Peiming  Ding Houyue
Abstract:The method, which was used to manufacture and test concave aspheric surface with large speed aperture using collimator in the past years,has many shortcomings,such as low making precision and long period etc. Now using compensatory ways, we can get more accurate surface in a relative short time. And its precision can get λ/10 ~ λ/20(rms).Through practice for a long time, it has been fully proved that this method is feasible.
Keywords:large speed aperture  concave aspheric surface   compensatory ways  
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