基座变形对微梁共振器固有频率的影响

利用解析方法分析了基座变形对微梁共振器固有频率的影响。用4个等效弹簧代替基座变形对微梁振动的影响；通过对基座变形的弹性分析确定了4个等效弹簧的刚度系数。通过对微梁(包括基座)的自由振动分析确定了微梁共振器的固有频率。有限元数值计算结果验证了分析方法的正确性。计算结果显示基座对微梁共振器的固有频率具有较大的影响而且这种影响随着梁的长高比的减小而增加。

Effect of Base Structural Deformation on Inherent Frequency of A Microbeam Resonator

The effect of base structural deformation on inherent frequency of a microbeam resonator is analyzed by using analytical method. 4 equivalent springs are used to replace the effect of microbeam vibration; through analyzing the elastics of base structural deformation, the stiffne coefficients of 4 equivalent springs are determined. The inherent frequency of the microbeam resonator is determined by analyzing the free vibration of the microbeam (including the base structure). The result of finite element numerical calculation demonstrates correctness of the method. The calculating result shows that the effect of base structure on its inherent frequency is higher, which increases with the reduction of its length-height ratio.