Source resistance reduction of AlGaN-GaN HFETs with novel superlattice cap layer

We have developed a novel AlGaN-GaN heterojunction field effect transistor (HFET) with an ultralow source resistance by employing the novel superlattice (SL) cap structure. The particular advantage of the SL cap, i.e., the existence of multiple layers of the polarization-induced two-dimensional electron gas (2DEG) with high mobility and high concentration at each AlGaN-GaN interface, is fully exploited for lowering the lateral resistance and the potential barrier at the interface of the SL cap and the HFET barrier layer. By designing the AlGaN-GaN thickness ratio, we have established a method to obtain the optimized SL structure and have achieved an extremely low source resistance of 0.4 /spl Omega//spl middot/mm which is lower not only than HFETs with the conventional structure but also than those with the n-GaN cap structure. The SL cap HFET fabricated on a sapphire substrate exhibited excellent dc and RF performance, i.e., maximum transconductance of over 400 mS/mm, maximum drain current of 1.2 A/mm, a cutoff frequency of 60 GHz, a maximum frequency of oscillation of 140 GHz, and a very low noise figure minimum of 0.7 dB at 12 GHz.