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High voltage applications and NBTI effects of DT-pMOSFETS with reverse Schottky substrate contacts
Authors:Yao-Jen Lee  Tien-Sheng Chao  Tiao-Yuan Huang
Affiliation:aDepartment of Electronics Engineering, Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan;bDepartment of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan;cNational Nano Device Labs., 1001-1 Ta Hsueh Rd., Hsinchu 300, Taiwan
Abstract:In this study, the characteristics of DT-pMOSFETs are discussed using the reverse Schottky substrate contacts. With this diode, the DTMOS can be operated at high voltage and temperature. In addition, it exhibited an improved driving current, DIBL, transconductance, and subthreshold slope. The driving current for DTMOS was 20% larger, and was 12 mV improved for DIBL under DTMOS operation. Furthermore, the NBTI effects of DTMOS were also reported for the first time. This is because DTMOS could operate just below 0.7 V of VG due to the junction turn-on behavior. It is interesting to note that the shift of the ΔVTH of pMOSFETs under NBTI measurement was significantly alleviated in the DT operating mode, about 30 mV improved after 10,000 s stressing, due to the alleviated electrical field across the gate oxide which was due to the substrate bias and the threshold voltage adjustment under DTMOS operation.
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