| 四元阵列MEMS矢量水听器的有限元分析 |
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| 引用本文： | 李振,,张丛,,刘涛,,张国军,,薛晨阳,.四元阵列MEMS矢量水听器的有限元分析[J].压电与声光,2013,35(6):910-914. |
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| 作者姓名： | 李振 张丛 刘涛 张国军 薛晨阳 |
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| 作者单位： | (1.中北大学 仪器科学与动态测试教育部重点实验室，山西 太原 030051；;2.中北大学 电子测试技术重点实验室，山西 太原 030051；;3.北方自动控制研究所，山西 太原 030051；;4.装甲军代局驻太原地区军代室，山西 太原 030051) |
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| 基金项目： | 国家“八六三”计划基金资助项目( 2011AA040404)；国家自然科学基金资助项目（61127008） |
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| 摘 要： | 运用ANSYS Workbench12.0有限元软件对一种单片四元阵列微机电系统(MEMS)矢量水听器微结构进行了有限元分析。首先介绍了四元微结构的工作原理，然后推导了四元微结构的数学模型并建立了有限元模型，最后对该微结构进行了静、动态特性分析，得到了该四元微结构的电压灵敏度为0.6 mV/Pa，维间耦合≤1.6%，固有频率为1 982.5 Hz，满足水听器设计指标。
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| 关 键 词： | 矢量水听器 微机电系统(MEMS) ANSYS Workbench12.0 四元阵列 Pro/E |
Finite Element Analysis of Four element Array MEMS Vector Hydrophone |
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| Affiliation: | (1. Key Lab. of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051,China;;2. Key Lab. of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;;3. North Automatic Control Technology Institute, Taiyuan 030051, China;;4. The Army Generation Chamber of Army Generation Bureau in Taiyuan, Taiyuan 030051, China) |
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| Abstract: | A finite element analysis of the single chip four element array MEMS vector hydrophone microstructure was carried out by finite element software of ANSYS Workbench 12.0. First, the four element microstructure's working principle was presented. Then its mathematic model is derived, and the finite element model of the microstructure was established. Finally, the static and dynamic characteristics of the microstructure were analyzed. The results indicated that the microstructure's voltage sensitivity was 0.6 mV/Pa, and the interference error is less then 1.6%, and the natural frequency is 1 982.5 Hz. The specifications can meet the requirements of the vector hydrophone's design. |
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| Keywords: | vector hydrophone MEMS ANSYS Workbench12 0 four element array Pro/E |
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