| 多层微悬臂梁压电薄膜致动器的静态分析 |
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| 引用本文： | 刘姣云,郑学军,龚跃球,彭书涛,朱哲,张阳军,刘勋.多层微悬臂梁压电薄膜致动器的静态分析[J].压电与声光,2013,35(6):842-845. |
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| 作者姓名： | 刘姣云 郑学军 龚跃球 彭书涛 朱哲 张阳军 刘勋 |
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| 作者单位： | （湘潭大学 材料与光电物理学院，湖南 湘潭 411105） |
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| 基金项目： | 国家自然科学基金资助项目(50872117)；长江学者奖励计划基金资助项目([2009]17) |
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| 摘 要： | 考虑缓冲层和电极层，建立了一个多层微悬臂梁压电薄膜致动器的静态模型来评估微悬臂梁的致动器的静态性能。对此模型致动器的自由端挠度和致动力进行模拟，同时将得到的结果与有限元模型结果进行对比验证模型的正确性。对比可知，理论模型与有限元模型相符。这项研究为压电致动器的结构设计和性能改善提供了帮助。
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| 关 键 词： | 多层微悬臂梁 压电薄膜 致动器 静态模型 挠度 致动力 有限元 |
Static Analysis on Multilayered Micro cantilever Piezoelectric Thin Film Actuator |
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| LIU Jiaoyun,ZHENG Xuejun,GONG Yueqiu,PENG Shutao,ZHU Zhe,ZHANG Yangjun and LIU Xun.Static Analysis on Multilayered Micro cantilever Piezoelectric Thin Film Actuator[J].Piezoelectrics & Acoustooptics,2013,35(6):842-845. |
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| Authors: | LIU Jiaoyun ZHENG Xuejun GONG Yueqiu PENG Shutao ZHU Zhe ZHANG Yangjun and LIU Xun |
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| Affiliation: | (Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan 411105, China) |
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| Abstract: | Considering the buffer layer and electrodes, a multilayered micro cantilever piezoelectric thin film actuator model was set up to evaluate the static performance the of micro cantilever piezoelectric actuator (MCPA). The tip deflection and tip force were simulated by using the theory models, and the results of the theory model were compared with the results of finite element model. The results of theory model were agreement with FEM results. The study and conclusions could be used for the structure optimized design and performance improvement of MCPA. |
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| Keywords: | micro multilayered cantilever piezoelectric thin film actuator static model tip deflection tip force finite element model |
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