LIGA micro-openings for coherence characterization of X-rays |
| |
| Authors: | V. Nazmov M. Kluge A. Last F. Marschall J. Mohr H. Vogt R. Simon |
| |
| Affiliation: | 1. Institute of Microstructure Technology/Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany
2. Institute for Photon Science and Synchrotron Radiation/Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany
|
| |
| Abstract: | Infinitely thin opaque screens serving for diaphragms as defined in the visible-light optics are not feasible for operation with X-ray beams due to their high penetrability. Micro-openings of predicted sidewall shape in a gold layer up to 140 μm thick which would provide low transparency, are proposed. The proposed micro-openings were made using the LIGA technique and tested successfully at photon energies of up to 25 keV. The micro-openings can be used as targets for coherence X-ray pattern or, if long interference tails are avoided by means of the advanced sidewall shape, as X-ray beam collimators. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
