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Fabrication and characterization of machined 3D diffractive optical elements |
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| Authors: | Stefan Kühne Kurt Haskic Stephanie Lemke Martin Schmidt |
| Affiliation: | 1. Fachgebiet Mikro- und Feinger?te, Institut für Werkzeugmaschinen und Fabrikbetrieb (IWF), Technische Universit?t Berlin, Pascalstr. 8-9, Sekretariat PTZ1, 10587, Berlin, Germany 2. Institut Nanometeroptik und Technologie, Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Stra?e 15, 12489, Berlin, Germany |
| Abstract: | The production of three dimensional blazed grating structures based on ultra-precision machining is an up-to-date issue. Hence, in the development of manufacturing technologies technology-related failure modes are generated due to structural variations. These failure errors must be recorded in cause and effect and then characterized by their type in order to achieve the optimum quality. This paper addresses the influence of processing parameters on the shape-persistence and hence on the grating quality and explains the possibility of detection and classification of them. |
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