| 磁控溅射法ZnO-TiO2复合薄膜的制备及性能 |
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| 引用本文： | 邵红红,都红,王季. 磁控溅射法ZnO-TiO2复合薄膜的制备及性能[J]. 金属热处理, 2012, 37(5): 92-95 |
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| 作者姓名： | 邵红红 都红 王季 |
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| 作者单位： | 江苏大学材料科学与工程学院,江苏镇江,212013 |
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| 摘 要： | 采用双靶共溅射的方法在FJL600EI型超高真空多功能磁控溅射仪上制备不同复合量的ZnO-TiO2复合薄膜,对不同工艺参数制备的ZnO-TiO2复合薄膜进行形貌结构分析、光催化性测定和亲水性检测。结果表明,当Ti靶材的溅射功率为150 W时,得到了颗粒大小均匀的ZnO-TiO2复合薄膜,且复合薄膜对甲基橙的降解率最高,亲水性最优。ZnO-TiO2薄膜的光催化性明显高于单一ZnO薄膜。
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| 关 键 词： | 磁控溅射 ZnO-TiO2复合膜 光催化性 亲水性 |
Preparation and properties of ZnO-TiO2 films by magnetron sputtering |
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| SHAO Honghong,DU Hong,WANG Ji. Preparation and properties of ZnO-TiO2 films by magnetron sputtering[J]. Heat Treatment of Metals, 2012, 37(5): 92-95 |
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| Authors: | SHAO Honghong DU Hong WANG Ji |
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| Affiliation: | (School of Material Science and Engineering,Jiangsu University,Zhenjiang Jiangsu 212013,China) |
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| Abstract: | The ZnO-TiO2 films were deposited by magnetic co-sputtering.Effect of the parameters of DC magnetron sputtering on the structure and surface morphology of the thin films was systematically studied by X-ray diffraction,Raman spectra(XRD) and scanning electron microscope(SEM),and the photocatalytic activity and hydrophilicity of the films were detected.The results show that photocatalytic activity and hydrophilic of ZnO-TiO2 films are significantly higher than that of ZnO film,and ZnO-TiO2 films has the highest degradation rate of methyl orange at the power of 150 W of Ti target,as well as the hydrophilicity is optimal. |
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| Keywords: | magnetron sputtering ZnO-TiO2 films photocatalytic activity hydrophilicity |
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