|
|||||
|
|
| 一种基于QCM的液相混合微芯片的制作与应用 | |
| 引用本文： | 朱德峰,许宝建,程建功,金庆辉,赵建龙,徐元森. 一种基于QCM的液相混合微芯片的制作与应用[J]. 功能材料与器件学报, 2010, 16(2) |
| 作者姓名： | 朱德峰 许宝建 程建功 金庆辉 赵建龙 徐元森 |
| 作者单位： | 1. 中国科学院上海微系统与信息技术研究所,上海,200050;中国科学院研究生院,北京,100039 2. 香港理工大学,医疗科技及资讯学系,香港 3. 中国科学院上海微系统与信息技术研究所,上海,200050 |
| 基金项目： | 国家重点基础研究发展规划(973计划)，上海市科委项目 |
| 摘 要： | 生物定量检测中,生物样品是否均匀混合的研究意义重要。石英晶体微质量天平(QCM)因其振幅谐振机理,而具备优异的超声混合性能。本文结合微电子机械系统(MEMS)工艺,利用双面曝光、QCM预支撑和120℃长时间烘胶等改进方法,制备了尺寸可控、表面平整、结合紧密的SU-8芯片主体结构,利用聚二甲基硅氧烷(PDMS)封装获得完整的液相混合微芯片,最后利用罗丹明B荧光染料和SiO2纳米球对芯片的混合性能进行了表征。同时,本文提供了一种小体积、便捷、通用性好的液相混合微芯片的制备方法。 |
| 关 键 词： | 混合 谐振 |
Fabrication and application of a microchip based on QCM for solution mixing |
|
| Abstract: | Uniform mixing of biological samples is important for quantitative detection.QCM(Quartz Crystal Microbalance)supports excellent ultrasonic ability for its amplitude resonance.An effective microchip based on QCM and SU-8 for solution mixing was reposed in this paper..The SU-8 main chip with controllable size,smooth surface and total binding,which was finally integrated with PDMS elastomer,was fabricated by improved MEMS technology,such as double-side exposure,pre-supporting of QCM and long time hard bake at 120℃.The mixing ability of this chip was characterized by Rhodamine B and SiO2 nano-spheres.This paper will contribute to fabrication of mixing chips which are small size,convenient to be used.effective and easy to be integrated with other functional microchips. |
| Keywords: | QCM SU-8 PDMS QCM SU-8 PDMS mixing resonance |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |