| 光谱测量在宽带膜厚监控系统中的应用 |
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| 引用本文： | 尚小燕,韩军,孔英秀. 光谱测量在宽带膜厚监控系统中的应用[J]. 西安工业大学学报, 2006, 26(1): 25-28 |
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| 作者姓名： | 尚小燕 韩军 孔英秀 |
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| 作者单位： | 西安工业学院光电工程学院 西安710032 |
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| 基金项目： | “十五”预备第一批兵器支撑基金项目(YJ0267051) |
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| 摘 要： | 在宽带膜厚监控系统中,对光谱光强的实时准确测量是系统控制成败的关键.根据系统结构,分析了影响系统光谱分辨率的因素,选取合适的光栅、CCD.实验表明:增加狭缝宽度虽然提高了信号强度,但降低了系统分辨率.根据控制要求,确定狭缝宽度为1.4mm.采用汞灯的特征谱线对CCD像元与光谱波长的对应关系进行标定,实验结果表明满足对膜系光谱特性的要求.
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| 关 键 词： | 膜厚控制 光谱光强 光谱分辨率 标定 |
| 文章编号： | 1000-5714（2006）01-025-04 |
| 收稿时间： | 2005-03-13 |
| 修稿时间： | 2005-03-13 |
Application of Spectrum Measurement to Wideband Monitoring System of Thin-Film Thickness |
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| SHANG Xiao-yan,HAN Jun,KONG Ying-xiu. Application of Spectrum Measurement to Wideband Monitoring System of Thin-Film Thickness[J]. Journal of Xi'an Institute of Technology, 2006, 26(1): 25-28 |
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| Authors: | SHANG Xiao-yan HAN Jun KONG Ying-xiu |
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| Abstract: | An accurate real-time measurement of spectrum intensity is critical to wideband monitoring system of thin-film thickness.Based on the analysis of influence factors to spectram resolution suitable grating and CCD are selecfed in accordance with the system structure.It is proved by experiments that signal intensity increases,but systen,resolution dcreases if the slit wideness is increased.To meet the system reguirements,slit wideness of 1.4 mm is determined.The corresponding calibration of CCD image-unit and spectrum wavelength is realizod by the typical spectrum lime of standard light source. |
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| Keywords: | thin-film thickness monitoring spectrum intensity spectrum resolution calibration |
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