Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysis |
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| Authors: | K. Nomura Y. Ujihira S. S. Sharma A. Fueda T. Murakami |
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| Affiliation: | (1) Faculty of Engineering, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku, 113 Tokyo, Japan;(2) Kogakuin University, Nishishinjuku 1-24-2, Shinjuku-ku, Tokyo, Japan |
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| Abstract: | Various kinds of SnO2 films, modified with the addition of iron, antimony, copper, titanium, manganese, nickel, cobalt or calcium oxides, were fabricated by using the spray pyrolysis technique and their gas-sensing characteristics were studied. From electrical measurements in air, the relative sensitivity towards inflammable gas of these SnO2-based film sensors was compared. It was observed that SnO2-based films of higher electrical resistance had a tendency to have higher sensitivity towards ethanol than the SnO2-based films of lower resistance. The addition of p-type metal oxides, such as NiO and MnO, to the SnO2 matrix was found to be effective in increasing the sensitivity towards inflammable gas. |
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