Fe-(Co6Ag94)颗粒膜磁光芯片的制备及研究

采用二分掩膜技术向溅射沉积的(Co6Ag94)薄膜中组合注入Fe离子，制备成具有不同Fe含量的16单元Fe-(Co6Ag94)颗粒膜磁光芯片。对制备态和退火态的Fe-(Co6Ag94)颗粒膜的物相进行了XRD研究。不同退火温度下，物相的演变反映出了退火过程中Co、Fe相和FeCo相纳米微晶的析出长大过程。采用原子力显微镜(AFM)对薄膜表面的研究结果表明，在退火过程中形成了嵌于基底中的纳米颗粒相。对制备态和不同温度退火后芯片各单元的磁光性能进行了测量，结果表明极向Kerr旋转角晚随着注入Fe含量的增加而增大，这可归因于颗粒膜中铁磁相的增多。在500℃以下，随着退火温度的增加，Fe-(Co6Ag94)颗粒膜的克尔磁光效应增加。对不同温度退火的样品进行穆斯堡尔谱测量，结果证明一定尺寸纳米Fe微晶颗粒的出现是磁光效应提高的主要原因之一。

Study on the magnetooptic materials chip of Fe-(Co6Ag94) films

A magneto-optic chip of Fe-(Co6Ag94) granular film was fabricated by combinatorial implantation of Fe ions into co-sputtered Co6Ag94 films. Structures of the as-prepared and annealed films have been estimated by XRD, and evidenced the precipitation and growth of granular phase. The AFM has been employed to study the surface morphology and the grains size. The changing of surface morphology with annealing temperature indicates that nanoparticles embedded in the Ag matrix have been formed during annealing. The effects of Fe content, as well as the annealing temperature on the magneto-optic polar Kerr effect have been investigated. It suggests that the Kerr rotations rise with increasing Fe content, which contribute to the magnetic moment. Precipitation and growth of Co, Fe, FeCo granules resulting from the annealing also lead to the increases of MOKE. The study shows that the addition of Fe increases the Kerr rotation of CogAg94 granular films, while the Mossbauer study shows that the precipitation of nanocrystallites plays a major role in the enhancements of MOKE.