An optical configuration for fastidious STEM detector calibration and the effect of the objective‐lens pre‐field |
| |
| Authors: | L. JONES A. VARAMBHIA H. SAWADA P.D. NELLIST |
| |
| Affiliation: | 1. School of Physics, Trinity College Dublin, Dublin 2, Ireland;2. Advanced Microscopy Laboratory, Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Dublin 2, Ireland;3. Department of Materials, University of Oxford, Oxford, U.K.;4. JEOL Ltd, Musashino, Akishima, Tokyo;5. Electron Physical Sciences Imaging Center, Diamond Light Source Ltd. Didcot, U.K. |
| |
| Abstract: | In the scanning transmission electron microscope, an accurate knowledge of detector collection angles is paramount in order to quantify signals on an absolute scale. Here we present an optical configuration designed for the accurate measurement of collection angles for both image‐detectors and energy‐loss spectrometers. By deflecting a parallel electron beam, carefully calibrated using a diffraction pattern from a known material, we can directly observe the projection‐distortion in the post‐specimen lenses of probe‐corrected instruments, the 3‐fold caustic when an image‐corrector is fitted, and any misalignment of imaging detectors or spectrometer apertures. We also discuss for the first time, the effect that higher‐order aberrations in the objective‐lens pre‐field has on such an angle‐based detector mapping procedure. |
| |
| Keywords: | ADF‐STEM detector angle calibration detector sensitivity measurement EELS quantitative STEM |
|
|
