基于集总参数宏模型的微机械陀螺多域耦合分析

对微机械陀螺中静电、结构、空气阻尼等物理域进行有效分离，在分别对各域进行数值模拟的基础上提取相应的物理参数，建立集总参数模型。在考虑边缘效应的情况下，提取了微结构电容与位移的解析表达式；根据热一流体类似方法，提取了阻尼孔结构的阻尼系数和压膜刚度；根据结构动力学理论，由模态分析提取结构的有效刚度和有效质量。将这些物理参数综合在系统仿真器中与外围电路共同进行仿真，准确地评估不同条件下微机械陀螺的行为特性。

Multiple-domain Coupling Analysis Based on Lumped Parameter Macromodel for Micromachined Gyroscope

The multiple domain ot micromactamea gyroscope was decomposed into elastic field,electrostatic field and air-damping field. The lumped parameter model for every domain, therefore, was utilized to analyze its coupling effects. With edge-effect considered, the analytical equation between capacitance and displacement was obtained, the damping coefficients and squeeze stiffness coefficients of MEMS structures with perforation holes, the equivalent stiffness and mass were also computed respectively. At last, the system simulation under different conditions was accomplished by inserting the obtained lumped parameter models into a system level simulator.