Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure |
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| Authors: | L V Sokolov N A Agafonova Yu V Naumov |
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| Affiliation: | (1) Research Institute of Aviation Equipment, Zhukovskii, Russia;(2) Lenin Ivanovo State Power Engineering University, Ivanovo, Russia |
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| Abstract: | Approximation expressions for use in calculating tangential deformations on the surface of an E-type silicon piezoresistive
membrane pressure transducer with three-dimensional micromechanical structure under actual operating conditions of a permanent
joint and restraint by means of a supporting element are obtained.
Translated from Izmeritel’naya Tekhnika, No. 3, pp. 36–39, March, 2009. |
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| Keywords: | E-type silicon micromechanical piezoresistive membrane pressure transducer approximation of relative resistance mathematical model |
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