小功率微波微等离子体源的集成研究

提出了一种小功率集成微波微等离子体源的结构,通过平面微带渐变螺旋电感耦合线圈激励微波微等离子体。研究表明,该集成微波微等离子体源具有频率可调、功率可调的特点,频率范围为2. 3 ~ 2. 6GHz,输出功率范围为20 ~40dBm。在频率为2477MHz、空气真空度为3. 7 Torr,输入功率为2. 15W 时,平面微带渐变螺旋电感耦合线圈能较好激励起微波微等离子体,这为微波微等离子体源的小型化研究提供了基础。

Integration of Low-Power Microwave Microplasma Source

A low-power microwave microplasma integrated source is presented in this paper, and the microstrip gradient spiral antenna is utilized to generate inductively-coupled microwave microplasma. The research shows that the integrated microwave microplasma source is characteristic of adjustable frequency and adjustable power, the frequency ranges from 2. 3GHz to 2. 6GHz and the microwave power ranges from 20dBm to 40dBm. When the air pressure is 3. 7 Torr and input microwave power is 2. 15W at the frequency of 2477MHz, the inductively-coupled microwave microplasma is ignited through the microstrip gradient spiral antenna. The study provides the basis on miniaturization of microwave microplasma source.