| 摘 要： | Surface of Al2O3 ceramic was processed by an excimer laser and the characteristics of topography were examined based on the application of thesystem(MEMS). It is indicated that the statistic pararueters of surface topography processed by the excimer laser have an obvioas regularity. The arithmeticmean value Ro and the root-mean square value Rq change with the changing of processing parameters in the same step and trend, and there is a quantitative relation between them. A simplified nuuIel is proposed for the excimer laser processing surface profile, whose results of the analysis and calculation agree basically with the experimental data. Furthermore, the surfaces processed by excimer laser are greatly fiat. Skewness root-mean-square value Zq changed little with the change of the technological parameters. The above characteristics depend on the processing principle of excimer laser, quite different from the cutting processing.
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