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基于石英音叉探针的原子力显微镜测头开发
引用本文:刘雷华,郭彤,李伟,王鹤群,高思田.基于石英音叉探针的原子力显微镜测头开发[J].计量学报,2016,37(3):225-229.
作者姓名:刘雷华  郭彤  李伟  王鹤群  高思田
作者单位:1.天津大学 精密测试技术及仪器国家重点实验室, 天津 300072
2.中国计量科学研究院, 北京 100029
基金项目:国家科技支撑计划(2011BAK15B02);高等学校学科创新引智计划(B07014)
摘    要:基于石英音叉探针开发了一种自感应原子力显微镜(AFM)测头。该测头通过自身输出电信号检测悬臂振幅变化,无需外部光学检测部件,易于集成。针对测头设计了微弱电流提取及寄生电容补偿电路。利用商业化锁相放大器实现了对测头幅度信号的获取。在此基础上对测头在调幅模式下的力-距离曲线和分辨力进行了测试。利用锁相放大器内置的PID模块实现了调幅模式下对样品表面形貌的测量。实验证明,该测头灵敏度为0.624 mV/nm,分辨力优于2 nm。

关 键 词:计量学  石英音叉探针  原子力显微镜  锁相放大器  力-距离曲线  PID控制  
收稿时间:2015-07-24

Development of AtomiC ForCe MiCrosCopy Measuring Head Based on QuartZ Tuning Fork Probe
LIU Lei-hua,GUO Tong,LI Wei,WANG He-qun,GAO Si-tian.Development of AtomiC ForCe MiCrosCopy Measuring Head Based on QuartZ Tuning Fork Probe[J].Acta Metrologica Sinica,2016,37(3):225-229.
Authors:LIU Lei-hua  GUO Tong  LI Wei  WANG He-qun  GAO Si-tian
Affiliation:1.State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin 300072, China 
2.National Institute of Metrology, Beijing 100029, China
Abstract:A self-sensing atomic force microscope(AFM)measuring head is developed based on a commercial quartz turning fork probe. The measuring head is easy to integrate and it can detect the amplitude variations of the cantilever through the electrical signal instead of using optical detection components. A weak signal detection and parasitic capacitance compensation circuit is designed for the measuring head. The amplitude signal of the measuring head is obtained using a commercial lock-in amplifier. And on this base the force - distance curve and resolution of the measuring head in amplitude modulation mode is tested. Using the PID module in lock-in amplifier,the topography of the sample is measured in amplitude modulation mode. The results indicated that the sensitivity of the measuring head is 0. 624 mV/ nm, and the resolution of the measuring head can reach less than 2 nm.
Keywords:metrology  quartz turning fork probe  atomic force microscopy  lock-in amplifier  force-distance curve  PID control
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