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| 基于Qplus技术的AFM测头研究 | |
| 引用本文： | 王志新,高思田,李东升,李琪,李适,李伟,施玉书. 基于Qplus技术的AFM测头研究[J]. 计量学报, 2016, 37(2): 113-117. DOI: 10.3969/j.issn.1000-1158.2016.02.01 |
| 作者姓名： | 王志新 高思田 李东升 李琪 李适 李伟 施玉书 |
| 作者单位： | 1.中国计量学院 计量测试工程学院, 浙江 杭州 310018; 2.中国计量科学研究院, 北京 100029 |
| 基金项目： | 国家科技支撑计划(2011BAK15B01、2011BAK15B02) |
| 摘 要： | 初步设计并组装了基于qPlus 技术的原子力显微镜（AFM）测头。使用石英音叉型力传感器替代了硅悬臂传感器,并设计了前置放大电路,研究了测头的频率特性,利用搭建的实验装置对测头的性能进行了测试。测试结果表明:该测头在频率调制（FM）模式下具有较高灵敏度。同时测头频率特性的研究显示探针及其粘接部位的质量是影响测头谐振频率的最主要因素。为qPlus-AFM测头的设计、组装及后续研究提供了经验和基础。 |
| 关 键 词： | 计量学 qPlus技术 原子力显微镜 石英音叉 频率调制模式 |
| 收稿时间： | 2015-09-07 |
Research of the Atomic Force Microscope Scanning Head Based on the qPlus Technology |
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| WANG Zhi-xin,GAO Si-tian,LI Dong-sheng,Li Qi,LI Shi,LI Wei,SHI Yu-shu. Research of the Atomic Force Microscope Scanning Head Based on the qPlus Technology[J]. Acta Metrologica Sinica, 2016, 37(2): 113-117. DOI: 10.3969/j.issn.1000-1158.2016.02.01 | |
| Authors: | WANG Zhi-xin GAO Si-tian LI Dong-sheng Li Qi LI Shi LI Wei SHI Yu-shu |
| Affiliation: | 1.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China; 2. National Institute of Metrology, Beijing 100029, China |
| Abstract: | The atomic force microscope(AFM)scanning head based on the qPlus technology is preliminarily designed and assembled. The silicon cantilever sensor is replaced by quartz tuning fork type force sensor. Preamplifier circuit is designed and frequency characteristic of this scanning head is also analyzed. Finally,the experimental device for this scanning head is set up to make performance test. The test results show that the scanning head has a high sensitivity in the mode of frequency modulation. Meanwhile,the analysis of frequency characteristic indicates that the weight of tip and the bonding portion is the main factor to influence the resonant frequency of this scanning head. This research provides experiences for the design and assembly of this type scanning head and also lays a foundation for further study. |
| Keywords: | metrology qPlus technology AFM quartz tuning fork mode of frequency modulation |
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