一种新型三维精密位移系统的设计与分析

研究开发了一种新型的大行程、纳米级和计量型三维精密位移系统。精密位移系统采用模块化结构设计，三个方向的驱动机构均采用完全相同的设计结构，分别称为X、Y、Z向一维工作台。位移系统在X、Y、Z三个方向采用粗、精两级驱动，并分别装有计量光栅。其中X、Y两个方向的驱动机构水平放置且为上下层叠式，Z方向上的驱动机构垂直放置。各方向粗驱动采用交流伺服电机配合精密丝杠和直线导轨进行驱动，精驱动采用压电陶瓷微位移器配合柔性铰链进行驱动，每个方向的两级驱动共用一套计量光栅，从而保证了位移系统的大行程、纳米级和计量型。介绍了位移系统的结构设计，分析了位移系统的位移分辨率、位移系统的计量原理以及位移系统的运动性能，从而为位移系统的设计提供理论依据。

Design and analysis of a novel 3D precision displacement system

A novel 3D precision displacement system of large travel, nanometer level and displacement measurement by itself has been developed. The precision displacement system is designed with modular structure. The driving mechanisms of three directions are adopted with identical design structure and called as X direction, Y direction and Z direction one-dimensional worktable respectively. The dual-stage actuators of coarse and fine driving have been applied in the precision displacement system in X, Y and Z directions and three sets of metrology gratings are installed in X, Y and Z directions respectively. In this system, the driving mechanisms of X direction and Y direction are placed horizontally with upper and lower stacked structure, the driving mechanism of Z direction is placed vertically. In every direction, AC servomotor coordinating with precision lead screw and linear guide actuate the coarse driving, piezoelectric micro-displacement actuator coordinating with flexure hinge actuate the fine driving, a set of metrology grating is used for the displacement measurement of the coarse driving and fine driving. Therefore the need of large travel, nanometer level and displacement measurement by itself of the displacement system can be satisfied. The structure design of the displacement system is introduced. The displacement resolution, the metrology principle and the motion performance of this displacement system are also analyzed in details. Thereby the theoretical basis for displacement system design is provided.