Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods |
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| Authors: | YJ Guo J Zhang C Zhao JY Ma HF Pang PA Hu F Placido D Gibson XT Zu HY Zu YQ Fu |
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| Affiliation: | 1. Department of Applied Physics, School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, PR China;2. Thin Film Centre, Scottish Universities Physics Alliance (SUPA), University of the West of Scotland, Paisley PA1 2BE, UK;3. Key Laboratory of Microsystem and Microstructure, Harbin Institute of Technology, Harbin 150080, PR China;4. Sichuan Institute of Piezoelectric & Acoustooptic Technology, Chongqing 400060, PR China;5. Gas Sensing Solutions Ltd, 60 Grayshill Road, Westfield North Courtyard, Cumbernauld, Glasgow G68 9HQ, UK |
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| Abstract: | Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods. |
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| Keywords: | A Thin films A Nanostructures C X-ray diffraction C Electron microscopy D Surface properties |
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