| 一种改进的膜片式FBG压力传感器的研究 |
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| 引用本文： | 张文涛,刘育梁,李芳. 一种改进的膜片式FBG压力传感器的研究[J]. 光电子．激光, 2008, 19(1): 43-45 |
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| 作者姓名： | 张文涛 刘育梁 李芳 |
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| 作者单位： | 中国科学院半导体研究所,集成电子学国家重点实验室,北京,100083;中国科学院半导体研究所,集成电子学国家重点实验室,北京,100083;中国科学院半导体研究所,集成电子学国家重点实验室,北京,100083 |
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| 摘 要： | 报道了一种改进的膜片式光纤布拉格光栅(FBG)压力传感器,采用特殊的膜片结构和凸台固定光纤的方式,解决了在以往膜片式光纤压力传感器中存在的栅区应力不均匀问题。对在不同固定方式下栅区的应力状态进行了理论分析。实验结果表明,该种传感器的灵敏度为14.81nm/MPa,在0.0～0.3MPa的量程内线性度在0.99以上,未出现光谱展宽现象。
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| 关 键 词： | 光纤布拉格光栅(FBG) 膜片 压力 光谱展宽 |
| 文章编号： | 1005-0086（2008）01-0043-03 |
| 收稿时间： | 2007-01-09 |
| 修稿时间： | 2007-04-14 |
Study on improved FBG pressure sensor based on diaphragm |
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| ZHANG Wen-tao,LIU Yu-liang,LI Fang. Study on improved FBG pressure sensor based on diaphragm[J]. Journal of Optoelectronics·laser, 2008, 19(1): 43-45 |
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| Authors: | ZHANG Wen-tao LIU Yu-liang LI Fang |
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| Affiliation: | ZHANG Wen-tao,LIU Yu-liang,LI Fang(State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China) |
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| Abstract: | An improved fiber Bragg grating(FBG) pressure sensor based on diaphragm is presented in this paper.A special flat diaphragm and the flange are introduced in the sensor to affix the FBG,which makes the strain in the FBG more uniform than that in traditional FBG pressure sensors.The strain distribution in the FBG with different affixing method is analyzed theoretically.The experimental results show that the sensitivity of the FBG pressure sensor is 14.81 nm/MPa,and the linearity in the full scale of 0.0～0.3 MPa is better than 0.99 without spectral expand. |
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| Keywords: | fiber Bragg grating(FBG) diaphragm pressure spectral expand |
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