Luminescence properties of ZnS:Mn nanocrystals embedded in SiO2 by ion implantation

Sequential multi-energy implantations of zinc and sulphur ions have been performed in a 250-nm thick SiO₂ layer thermally grown on 1 1 1 silicon. Energies and doses have been chosen to produce 10 at.% constant concentration profiles overlapping over about 100 nm. Manganese is subsequently introduced at various levels by the same way. Thermal treatments (from 700 to 1100 °C) lead to the formation of nanometric precipitates of the luminescent compound ZnS:Mn. A bimodal size distribution is observed, with a quasi-single layer of large particles (40 nm) in the end-of-range region and much smaller precipitates between this layer and the surface. The orange emission is maximal when the Mn concentration is close to 3%. Several hours at 900 °C is the best thermal budget for maximal luminescence intensity at room temperature. A shift of the excitation spectrum related to size variations, shows that the particles of smaller size are mainly responsible for the observed luminescence. In agreement with other authors, the luminescence lifetime is found in the ms range and increases with the nanocrystal diameter, tending to the lifetime of bulk ZnS. The luminescence of ZnS:Mn nanoparticles embedded in SiO₂ by ion implantation is also shown to be very stable during long UV light irradiation.