Large-area uniform evaporated thin films |
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| Authors: | JV Ramsay RP Netterfield EGV Mugridge |
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| Affiliation: | CSIRO Division of Physics, National Standards Laboratory, Sydney, Australia 2008 |
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| Abstract: | The production of uniformly thick (0.1% uniformity) films over large areas (≈200-mm diameter) is described. The technique uses a rotating substrate and a rotating shutter situated between the source and the substrate, the axis of rotation of the shutter being displaced from the line joining the centre of rotation of the substrate and the centre of the source. |
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