AuSiC Schottky barrier diodes

Results of the experimental study of Au n-type SiC Schottky barrier diodes at room temperature are presented. The diodes are fabricated by vacuum-evaporating gold on chemically etched n-type hexagonal (6H) SiC surfaces and exhibit excellent forward current vs voltage characteristics with the exponential factor n of about 1·07±0·02 for voltages between 0·35 and 0·85 V. The linear part of the characteristic, in a semi-logarithmic plot, extends over seven orders of magnitude in current. The forward current-voltage characteristics are found to agree quantitatively with the theory based on thermionic emission with the barrier height modified by image force lowering. The Schottky barrier height is determined from three independent techniques: differential capacitance vs voltage, photoresponse, and forward current vs voltage methods. The barrier height deduced from the three methods is about 1·40±0·05 V.