| 移相器类进动现象对干涉测量的影响 |
| |
| 引用本文： | 吴栋,朱日宏,陈磊,王青,何勇,高志山.移相器类进动现象对干涉测量的影响[J].中国激光,2004,31(7):61-864. |
| |
| 作者姓名： | 吴栋 朱日宏 陈磊 王青 何勇 高志山 |
| |
| 作者单位： | 1. 南京理工大学电光学院,江苏,南京,210094;解放军镇江船艇学院教研部,江苏,镇江,212003
2. 南京理工大学电光学院,江苏,南京,210094 |
| |
| 基金项目： | 国防军工计量“十五”重点项目 (编号 :6 0 80 3134)资助课题 |
| |
| 摘 要： | 压电晶体(PZT)光学移相器作为移相干涉仪(PSI)的关键部件，其移相误差直接影响被测波面的相位复原精度。分析了压电晶体移相器在移相过程中导致干涉图旋转的原因——类进动，其本质是移相器在伸长的同时其参考镜端面法线方向绕着伸长方向产生旋转。利用典型的Hariharan五步移相算法。得出了类进动现象所导致的波面相位复原误差计算公式，给出了在测试孔径上的误差分布图。对影响误差大小的主要因素如干涉条纹的宽度、旋转的角度和测试口径等进行了具体分析，由此推导出在移相干涉仪光学调整过程中控制干涉图旋转误差的准则。
|
| 关 键 词： | 光学技术与仪器 干涉测量 移相干涉仪 移相器 类进动 误差 |
| 收稿时间： | 2003/3/28 |
Effect of Phase Shifter's Sub-Processional Motion on Interferometry |
| |
| WU Dong ,ZHU Ri-hong,CHEN Lei,WANG Qing,HE Yong,GAO Zhi-shan School of Electronic Engineering and Photoelectric Technology,Nanjing University of Science and Technology,Nanjing,Jiangsu ,China Zhenjiang Watercraft Institute of PLA,Zhenjiang,Jiangsu ,China.Effect of Phase Shifter''''s Sub-Processional Motion on Interferometry[J].Chinese Journal of Lasers,2004,31(7):61-864. |
| |
| Authors: | WU Dong ZHU Ri-hong CHEN Lei WANG Qing HE Yong GAO Zhi-shan School of Electronic Engineering and Photoelectric Technology Nanjing University of Science and Technology Nanjing Jiangsu China Zhenjiang Watercraft Institute of PLA Zhenjiang Jiangsu China |
| |
| Affiliation: | WU Dong 1,2,ZHU Ri-hong1,CHEN Lei1,WANG Qing1,HE Yong1,GAO Zhi-shan1 1School of Electronic Engineering and Photoelectric Technology,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094,China 2Zhenjiang Watercraft Institute of PLA,Zhenjiang,Jiangsu 212003,China |
| |
| Abstract: | In modern digital phase-shifting interferometry (PSI), the phase-shifting error of piezoelectric transducer (PZT) optical phase shifter, which is the basic device of phase-shifting interferometer, directly effects measurement accuracy during wavefront phase unwrapping with phase-shifting interferograms. A phenomenon named sub-processional motion that can result in fringes′ rotation in the processing of phase shift is described. This phenomenon is derived from the normal-line rotation of standard reference surface revolving around the elongate direction of PZT phase shifter. In terms of the classic phase-shifting algorithm-Hariharan 5-Bucket algorithm, the error formula of phase unwrapping is given due to sub-processional motion, and the error distribution on aperture is also derived. Based on error factor analysis, criterions to control the error are presented at such aspects |
| |
| Keywords: | optics technique and instrument interferometry phase-shifting interferometer phase shifter sub-processional motion error |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
