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Ultrathin Crystalline Silicon Nano and Micro Membranes with High Areal Density for Low-Cost Flexible Electronics |
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| Authors: | Ju Young Lee Jongwoon Shin Kyubeen Kim Jeong Eun Ju Ankan Dutta Tae Soo Kim Young Uk Cho Taemin Kim Luhing Hu Won Kyung Min Hyun-Suh Jung Young Sun Park Sang Min Won Woon-Hong Yeo Jooho Moon Dahl-Young Khang Hyun Jae Kim Jong-Hyun Ahn Huanyu Cheng Ki Jun Yu John A Rogers |
| Affiliation: | 1. School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemungu, Seoul, 03722 Republic of Korea;2. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802 USA;3. School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemungu, Seoul, 03722 Republic of Korea
Center for Opto-Electronic Materials and Devices, Post-Silicon Semiconductor Institute, Korea Institute of Science and Technology (KIST), Seongbuk-gu, Seoul, 02792 South Korea;4. Department of Materials Science and Engineering, Yonsei University, 50 Yonsei-ro, Seoul, 03722 Republic of Korea;5. Department of Electrical and Computer Engineering, Sungkyunkwan University, Seongbuk-gu, Suwon, 16419 Republic of Korea;6. George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA, 30332 USA IEN Center for Human-Centric Interfaces and Engineering at the Institute for Electronics and Nanotechnology, Georgia Institute of Technology, Atlanta, GA, 30332 USA Wallace H. Coulter Department of Biomedical Engineering, Parker H. Petit Institute for Bioengineering and Biosciences, Georgia Institute of Technology, Atlanta, GA, 30332 USA Institute for Materials, Neural Engineering Center, Institute for Robotics and Intelligent Machines, Georgia Institute of Technology, Atlanta, GA, 30332 USA;7. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802 USA Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA, 16802 USA Materials Research Institute, The Pennsylvania State University, University Park, PA, 16802 USA;8. Querrey Simpson Institute for Bioelectronics, Northwestern University, Evanston, IL, 60208 USA |
| Abstract: | Ultrathin crystalline silicon is widely used as an active material for high-performance, flexible, and stretchable electronics, from simple passive and active components to complex integrated circuits, due to its excellent electrical and mechanical properties. However, in contrast to conventional silicon wafer-based devices, ultrathin crystalline silicon-based electronics require an expensive and rather complicated fabrication process. Although silicon-on-insulator (SOI) wafers are commonly used to obtain a single layer of crystalline silicon, they are costly and difficult to process. Therefore, as an alternative to SOI wafers-based thin layers, here, a simple transfer method is proposed for printing ultrathin multiple crystalline silicon sheets with thicknesses between 300 nm to 13 µm and high areal density (>90%) from a single mother wafer. Theoretically, the silicon nano/micro membrane can be generated until the mother wafer is completely consumed. In addition, the electronic applications of silicon membranes are successfully demonstrated through the fabrication of a flexible solar cell and flexible NMOS transistor arrays. |
| Keywords: | flexible electronics reusable silicon semiconductor electronics applications silicon nano/micro membrane sheet transfer |