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| 钨丝微电极阵列的简易制备方法 | |
| 引用本文： | 姚源,李刚,张华,周洪波,孙晓娜,朱壮晖,隋晓红,赵建龙.钨丝微电极阵列的简易制备方法[J].功能材料与器件学报,2009,15(1). |
| 作者姓名： | 姚源 李刚 张华 周洪波 孙晓娜 朱壮晖 隋晓红 赵建龙 |
| 作者单位： | 1. 中国科学院,上海微系统与信息技术研究所,上海,200050;中国科学院研究生院,北京,100039 2. 上海交通大学,激光与生物医学研究所,上海,200030 3. 中国科学院,上海微系统与信息技术研究所,上海,200050 |
| 基金项目： | 国家重点基础研究发展规划(973计划)，上海应用材料研究与发展项目，上海市自然科学基金，上海市优秀学科带头人计划 |
| 摘 要： | 本文提出了一种简易、低成本的钨丝微电极阵列制作工艺和方法.该方法采用MEMS工艺制作的玻璃模具实现钨丝阵列的精密有序排列,同时,在钨丝电极表面涂覆一层光敏性的聚酰亚胺作为绝缘层,结合"双面光刻"技术和电化学腐蚀技术实现电极位点大小和电极丝几何尺寸的精确控制.最后,通过注模、光刻制作SU-8固定座体完成钨丝微电极阵列的组装固定.整个制作工艺简单快速,且玻璃模具可重复使用,大大降低了制作成本.此外,本文还测试和评价了所制作微电极的表面形貌、电学性能以及生物相容性. |
| 关 键 词： | 微细加工 钨丝 微电极阵列 神经探针 双面光刻 |
An easy-to-prepare method for fabrication of tungsten microelectrode array |
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| YAO Yuan,LI Gang,ZHANG Hua,ZHOU Hong-bo,SUN Xiao-na,ZHU Zhuang-hui,Sui Xiao-hong,ZHAO Jian-long.An easy-to-prepare method for fabrication of tungsten microelectrode array[J].Journal of Functional Materials and Devices,2009,15(1). | |
| Authors: | YAO Yuan LI Gang ZHANG Hua ZHOU Hong-bo SUN Xiao-na ZHU Zhuang-hui Sui Xiao-hong ZHAO Jian-long |
| Affiliation: | 1.Shanghai Institute of Microsystem and Information Technology;Chinese Academy of Sciences;Shanghai 200050;China;2.Graduate School of the Chinese Academy of Sciences;Beijing 100039;3.Institute for Laser Medicine & Bio-Photonics;Shanghai Jiaotong University;Shanghai 200030;China |
| Abstract: | This paper provides a detailed process flow for fabricating an easy-to-prepare,inexpensive array of tungsten microelectrodes.Firstly,a MEMS-based glass mold was used to align the tungsten probes which had been coated with a layer of photosensitive polyimide.A combination of double-side photolithography and electrochemical etch was then performed to precisely define the length of probes and the shape of probe tips.Finally a SU-8 holder was fabricated with molding and photolithography to fix the array of tung... |
| Keywords: | microfabrication tungsten microelectrode array neural probe double-side photolithography |
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