| 具有CoCrPt硬磁偏置的微尺寸巨磁阻传感器 |
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| 引用本文： | 郑洋,曲炳郡,刘晰,韦丹,魏福林,任天令,刘理天.具有CoCrPt硬磁偏置的微尺寸巨磁阻传感器[J].半导体学报,2010,31(2):024005-5. |
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| 作者姓名： | 郑洋 曲炳郡 刘晰 韦丹 魏福林 任天令 刘理天 |
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| 作者单位： | Institute;Microelectronics;Tsinghua;University;Laboratory;Magnetism;Magnetic;Materials;Research;Lanzhou;Advanced;Department;Science;Engineering; |
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| 摘 要： | 本文介绍了一种基于GMR自旋阀的磁场传感器,它用于读取磁记录信息,并且通过硬磁偏置层解决了小尺寸GMR中存在的巴克豪森噪声问题. 传感器采用顶钉扎的自旋阀结构的GMR,磁电阻经过优化达到13.2%. 自旋阀的自由层被CoCrPt永磁体磁化到和被钉扎层的磁化方向相互垂直,这样可以使磁传感器得到线性的磁场探测性能. 对磁场传感器经过测试发现,硬磁偏置层在磁化后相较于磁化前,磁传感器的MR-H曲线得到明显改善,且矫顽力降低.
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| 关 键 词： | 巨磁电阻传感器 织构 微米 偏见 永磁偏置 噪音问题 磁传感器 磁电阻率 |
| 收稿时间： | 7/3/2009 12:59:57 PM |
| 修稿时间： | 9/15/2009 8:20:10 PM |
A micron-sized GMR sensor with a CoCrPt hard bias |
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| Zheng Yang,Qu Bingjun,Liu Xi,Wei Dan,Wei Fulin,Ren Tianling and Liu Litian.A micron-sized GMR sensor with a CoCrPt hard bias[J].Chinese Journal of Semiconductors,2010,31(2):024005-5. |
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| Authors: | Zheng Yang Qu Bingjun Liu Xi Wei Dan Wei Fulin Ren Tianling and Liu Litian |
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| Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Key Laboratory of Magnetism and Magnetic Materials, Research Institute of Magnetic Materials, Lanzhou University, Gansu 730000, China;Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China;Key Laboratory of Magnetism and Magnetic Materials, Research Institute of Magnetic Materials, Lanzhou University, Gansu 730000, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China |
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| Abstract: | A GMR(giant magneto-resistive) spin valve sensor for magnetic recording has been designed in an attempt to solve the Barkhausen noise problem in small-sized GMR sensors.In this study,the GMR ratio of the top-pinned spin valve is optimized to a value of 13.2%.The free layer is magnetized perpendicular to the pinned layer by a CoCrPt permanent magnetic bias so that a linear magnetic field response can be obtained.An obvious improvement on performance is observed when the permanent magnetic bias is magnetized,... |
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| Keywords: | GMR spin-valve magnetic stabilization Barkhausen noise |
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