Preparation of KTiOPO4 thin films on different substrates by pulsed laser deposition |
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Authors: | Nilesh J. Vasa Yasunari Hata Tsuyoshi Yoshitake Shigeru Yokoyama |
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Affiliation: | 1. Department of Mechanical Engineering, Indian Institute of Technology Madras, Chennai, 600036, India 2. Department of Applied Science for Electronics and Materials, Kyushu University, Fukuoka, 816-8580, Japan
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Abstract: | Pulsed laser deposition (PLD) technique is applied in fabrication of thin films of KTiOPO4 (KTP) material, which possesses electro-optic and nonlinear optical properties. Thin film fabrication of optically functional KTP on fused silica and different sapphire substrates by changing an ambient oxygen pressure and a substrate temperature during PLD is investigated. Highly oriented KTP thin films could be grown on sapphire $ {left( {11overline{2} 0} right)} $ in an oxygen atmosphere by PLD using a composite target whose stoichiometry is nearly same as KTP. Although the film contained polycrystalline crystallites, predominant crystallites seemed to be epitaxially grown. |
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